円弧はりを用いた除振テーブルの研究 : 円弧はりをテーブル板に固定した場合

概要

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This paper describes the static characteristics and the frequency responses of a new type isolated table which is simple in its structure. The isolated table is composed of four circular arc beams, four oil dampers, a table-board and a base-board. The both ends of the four circular arc beams are fixed on to the four corners of the square table-board and base-board. On the other hand, the both ends of the four oil dampers are pinned at the four corners of the table-board and the center of the base-board. The stiffnesses of the isolated table in the horizontal and vertical directions are analyzed and compared with the experimental results. Its frequency responses in the horizontal direction are measured, and the effect of vibration isolation of the oil damper is discussed experimentally and theoretically. This isolated table has almost the same stiffness in every direction in a horizontal plane, and the directions of the vibration of the table-board and the movement of the base-board are almost the same.
公益社団法人精密工学会の論文
1990-12-05