レーザ光の反射光点変位検出による工作機械コラムの熱変位制御

概要

論文の詳細を見る
Thermal deformation of machine tool structures, especially the distortion of machine tool column directly introduces straight motion error and straightness error of machine tools. The purpose of this study is to develop the non-contact measuring method of the distortion of the column using laser spot detection system, to measure their thermal behaviour, and to compensate for the distortion of the column by controlling artificial heat sources installed in its rear sides. The thermal behaviour of a model column and an actual machine tool column was measured to examine the effectiveness of this measuring and compensating method. From these results, the measuring accuracy of the thermal displacement of the column was within ±2 μm, and thereby the straightness accuracy of the column could be maintained to better than ±2 μm/m regardless of the thermal disturbances.
公益社団法人精密工学会の論文
1989-09-05