静圧支持回転軸系の回転振れ自動補正機構 : 基準部誤差の測定と自動補正

概要

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For structuring the system of automatic spindle runout compensation unit with high accuracy and high stiffness involving high precision roundness measuring equipment of datum surface of spindle for detecting runout, the following two problems have to be solved; (1) separation of roundness error and runout by processing the output signals of probes and systematisation with runout compensating actuators, and (2) introduction of actuators with high resolution and high stiffness sufficiently compensative to the sensitivity of probes (refer to 1st report) Considering the two probes measuring method, separation of roundness error of even number of lobes and spindle runout has been tried and comparing the test results using the conventional two probes method with ones using the newly proposed clearance controlled method, the following have been concluded : (1) In viewpoint of measuring accuracy, both methods have measuring error and 3σ of less than 1 LSB, (2) In viewpoint of compatibility connecting compensating actuators, the latter is preferable. The design concept of introducing the clearance controlled method can be applicable to a generalized spindle runout compensation system by considering geometrical arrangement of probes as well as for the above mentioned limited roundness error of even number of lobes.
公益社団法人精密工学会の論文
1989-02-05