PI-CVD法によるダイヤモンド状薄膜の合成及びビデオ用蒸着テープへの応用

概要

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Diamond-Like Carbon films (DLC films)of Knoop hardness of 2800 were deposited at low temperature with a deposition rate of 3000A/min by a new method (PI-CVD method). The DLC films were deposited by accelerated ions and radicals from glow discharge plasma of CH_4 and Ar. The method is suitable to deposit the film on the metal-evaporated video tape. The DLC films of 100A in thickness were examined if they were suitable for a protective coating for the tape by VTR-like rotary-head still test and repeated playback test. No degradation in the reproduced output level was observed for the DLC film coated tape during 100 hour run, while the output level of the tape without the DLC film degraded after 1.5 hours run in the still test. And the DLC film also greatly improved the durability of the tape in the repeated playback test.
公益社団法人精密工学会の論文
1989-02-05