ばね支持された小形微動台の開発

概要

論文の詳細を見る
A small, precise and fast positioning stage is indispensable for assembly of small parts, i.e. laser transmitter modules and optical fiber connectors. Conventional stages using roller bearings or ball bearings are too massive with respect to the assembly. Stages guided by a parallel spring arrangement are fairly compact and very responsive, and can provide rapid positioning. The basic elastic linkage which is the parallel spring movement is very usefull, but has only one degree of freedom. Most assembly motions require two or three degrees of freedom. This paper deals a new one-piece compound parallel spring with two or three degrees of freedom. This spring system is realized by means of a CNC wire cut electric discharge machine and/or drilling machine from a block or plate. Design considerations and performance measurements are presented.
公益社団法人精密工学会の論文
1988-07-05