イオンスパッタ加工の加工表面粗さに関する研究 : SKDIの場合

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概要

• 論文の詳細を見る

• This paper presents the influence of the machining conditions : the machining time, the ion (argon) energy, the ion current density and the beam angle on the surface roughness and on the machining depth for the high chromium-high carbon steel (SKD 1). Also, the characteristic of roughness is discussed from the measurement of the surface asperities by a scanning electron microscopy and the analysis of chromium by an electron probe micro analysis. In addition, as the method to obtain a good surface roughness, Floating Method which applies the positive charge to the workpiece is tested. The results obtained are as follows : (1) The machining depth increases linearly with the time, but the surface roughness is not changed significantly at the initial stage of the machining (up to about 0.03μm depth) and at the subsequent stage the surface roughness increases with the time. (2) The smaller the ion energy and ion current density, the lower the surface roughness becomes. And as the ion current density decreases, the surface roughness becomes independent from the ion energy. (3) Although the maximum machining depth is found at about 50 degress of the beam angle, the minimum surface roughness is found at about 70 degrees. (4) By Floating Method, the size of the workpiece can be controlled with a high level of accuracy without a change of the surface roughness. (5) The surface roughness of cromium-carbide in SKD 1 decreases only slightly.

• 公益社団法人精密工学会の論文
• 1988-05-05

著者

• 井上 徳之

  東海大学工学部

• 志真 俊夫

  東海大学工学部精密機械工学科

• 井上 徳之

  東海大学大学院

• 志真 俊夫

  東海大学工学部

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• 耐スペースデブリシールドの自己修復型充填材料の最適材料設計条件(J09-5 破壊と修復,J09 知的材料・構造システム)
• Heイオンビ-ム加工による表面粗さの改善 (イオンビ-ムによる表面改質とパッシベ-ション)
• 低エネルギーイオンビーム加工の表面粗さに関する研究
• イオンスパッタ加工の加工表面粗さに関する研究 : SKDIの場合
• Heイオンビーム加工による表面粗さの改善

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