低エネルギーイオンビーム加工の表面粗さに関する研究

概要

論文の詳細を見る
The authors already reported the influence of various machining conditions of ionbeam machining on the machined surface roughness. According to studies done to date, it was clear that the increase of surface roughness became small at a low ion energy. In this paper, the effectiveness of vias voltage method, where the low ion energy can easily be controlled by applying the positive charge from the vias voltage supply to the workpiece, is investigated in detail with respect to the influence of the low ion energy on the surface roughness for the mirror finished die steel (SKD-1). The results obtained were as follows : (1) The surface roughness can be decreased by the vias voltage method. (2) The optimum ion energy and ion current density are found to obtain the small surface roughness. (3) At around 70 degrees of the ion beam angle, the minimum surface roughness of about 7 nm R_<max> is obtained. (4) The rectangular shaped part (chromium-carbide) is more likely to be formed by the normal incident ion than the oblique one.
東海大学の論文