アコースティックエミッションフィードバック制御による超精密加工の精度向上

概要

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In order to improve machining accuracy of diamond turning, an acoustic emission (AE) feedback control scheme is considered in this paper. An acoustic emission root means square (Aerms) signal is utilized to integrate additional AE feedback control loop with a conventional position feedback control system. In preliminary experiments in advance of the AE feedback control design, a correlation between a machining error and a measured Aerms has been verified. Based on the preliminary experiments, the AE feedback control system has been designed. The designed controller calculates a compensation signal for the conventional position feedback system to improve the machining accuracy. Machining tests using a diamond turning machine showed that the proposed controller accomplishes 20 percent reduction of machining error compared to conventional position feedback control. Machining tests using various diamond cutting tools showed that the AE feedback can be applied for on-line tool wear monitoring.
公益社団法人精密工学会の論文
2003-03-05