真空雰囲気の流体マイクロメータの特性とその供給圧との関係

概要

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This paper is concerned with transfer characteristics of a fluidic micrometer of gauging a very small displacement in vacuum space. In the micrometer, gas flows from a constant pressure supply chamber into an intermediate chamber through an orifice, and then leakes into the vacuum space through a gap between a nozzle and its counter face to be measured. Both static and dynamic performance of the micrometer is studied in relations o the supply pressure up to 200 kPa with experimental examples. The results are as follows; the static characteristic curves obtained in case of various supply pressure, when output pressure is represented in a normalized expression, are identical; the time constant which represents the dynamical performance of the micrometer varies as a function of the operating pressure; the time constant , increases in proportion to the operating pressure up to a maximum value and then decreases, and such tendency and its magnitude is almost independent with the supply pressure.
公益社団法人精密工学会の論文
1983-04-05