油圧シリンダ駆動による精密XYステージ

概要

論文の詳細を見る
An accurate positioning XY stage has been constructed to help assure submicron pattern generation in electron beam microfabrication. The stage is guided along journal-type hydrostatic bearings, and driven by hydraulic cylinders along X and Y axes. Characteristics of the stage mechanism and servo system are reported on in this paper. Sufficient straightness for electron beam microfabrication is realized. Vertical displacement is 0.9μm for 80mm x 80 mm stage travel, and yaw is 4 μrad for 140mm along the X and Y axes. Automatic regulation of feedback gain allows stable positioning with high accuracy, and servo stiffness prevents interaction between the X and Y axes. Due to these functions, a positioning accuracy of ±0.1μm for 2 mm and 0.5 μm travel is attained. High speed positioning is also possible due to the high responsibility of the electro-hydraulic servo and miniaturization of the stage mechanism. Positioning time is 0.1s for 2 mm and 0.56 s for 20 mm travel.
公益社団法人精密工学会の論文
1983-10-05