半導体環境学 : 環境安全に配慮した稀少元素リサイクルに関する研究

概要

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In the 21st century, in the fabrication of various industrial parts, in particular, current and future electronics devices in the semiconductor industry, environmental safety issues should be carefully considered. We coined a new term, "environmental safety issues for semiconductors", for our consideration of semiconductor research and technology which consider environmental and ecological factors. The main object of this analysis is the present situation of environmental safety problems in the semiconductor industry; some of the issues considered are : (1) the generation and use of hazardous toxic gases, such as AsH_3,PH_3,GeH_4,Cl_2 and HCl in many processes such as crystal growth, etching, CVD, and annealing; (2) the generation of industrial toxic wastes in the semiconductor process and the recycling of these wastes. We mainly focused the topic on crystal growth process in III-V compound semiconductor, such as molecular beam epitaxy (MBE) and metalorganic chemical vapor deposition (MOCVD).
宇部工業高等専門学校の論文