高純度ケイ素製造の中間工業化試験(第1報) : 三塩化シランの製造について

概要

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Trichlorosilane was produced in a pilot plant by the reaction of silicon powder with hydrogenchloride in preparing high purity silicon. After preliminary experiments with static reaction apparatus, the pilot plant having a stirring type reaction apparatus was set up. The reaction apparatus of which the inner diameter was 80mm and the length was 2500mm had a jaket in which a heat medium circulated to control the reaction temperature. To stir raw silicon powder, a shaft mounted with a ribbon flight was rotated in the center of the reaction tube. In the optimum condition, the trichlorosilane content of the product was above 90% and the yield of trichlorosilane based on the amount of the hydrogen chloride was above 85%. The capacity of the pilot plant to produce trichlorosilane was above 3.4 kg per hour.
東北大学の論文
1967-11-05