Y_2O_3 および Al_2O_3 を添加した非晶質 Si-N-C 微粉末の微細構造

概要

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Microstructure of amorphous Si-N-C fine powders with Y_2O_3 and Al_2O_3 were studied by weightloss measurements, X-ray diffraction, scanning electron microscopy, EPMA and chemical analysis. Si-N-C fine powders were prepared by pyrolysis of hexamethyldisilazane ((Me_3Si)_2NH, Me=CH_3). The powders were almost spherical and were 100-300nm in size before heat treatment. The Si-N-C fine powders were mixed with 6wt% of Y_2O_3 and 2wt% of Al_2O_3 in a plastic bottle using Si_3N_4 balls and ethanol for 18ks, and then the powders examined were heat-treated in a nitrogen atmosphere at a temperature of 1873,1973 and 2073K for periods of 7.2ks. The weight-losses of the sample increased with an increasing temperature of heat treatment. Crystallized phases of the samples were mainly β-SiC and α-Si_3N_4. After heat treatment at 1873 and 1973K for 7.2ks, z-Y_2Si_2O_7 phase was observed for the Si-N-C-Y_2O_3-Al_2O_3. The formation of z-Y_2Si_2O_7 consistent with decrement of formation of Si phase. Crystallized β-SiC for the Si-N-C was smaller in size than that for the Si-N-C-Y_2O_3-Al_2O_3.
湘南工科大学の論文
1991-03-31