<研究報告>真空蒸着法によるLi_2O-B_2O_3系リチウムイオン伝導体薄膜の作製
スポンサーリンク
概要
- 論文の詳細を見る
Thin films of Li_2O-B_2O_3 solid electrolyte have been prepared by the physical vapor deposition method. Lithium content in the films was determined by SIMS and its dependence on the depositing conditions was discussed. The lithium content was primarily determined by the vapor pressure of gasseous species equilibrated with the melt of the evaporting source. While, the decrease in the content in the films formed on heated substrates was considered to occur secondarily as a result of diffusion of lithium into the substrate.
- 沼津工業高等専門学校の論文
- 1988-01-30