<研究報告>SIMSによるSiO_2中の水の拡散係数の測定
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概要
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Depth profiles of deuterium in fused silica have been determined by SIMS after diffusion-annealing in D_2O/N_2 mixed gas (partial pressure of D_2O vapor = 0.36atm) at temperatures ranging 973 to 1373K. The effective diffusion coefficient of deuterium was determined and expressed as De (m^2/s) = 2.3 x 10^<-10> exp [-88 (kJ/mol)/RT]. Using Doremus' equation, the diffusion coefficient of molecular water was estimated to be D (m^2/s) = 4.6 x 10^<-8> exp [-74 (kJ/mol)/RT]. Ratio of permeability of H_2O molecule to that of OH was also estimated to be approximately unity; from this, it was deduced that water molecule associated with short range exchange reaction with the silica network could be diffusion species.
- 沼津工業高等専門学校の論文
- 1987-01-31