Electron Transport to a Substrate in an rf Capacitively Coupled Plasma by the Boltzmann Equation
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概要
著者
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シバタ マリ
Process Development Division Fujitsu Limited
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マカベ トシアキ
Professor, Dept. of Electronics and Electrical Engineering, Keio University
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マツイ ジュン
Student, Dept. of Electronics and Electrical Engineering, Keio University
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ナカノ ノブヒコ
Instructor, Dept. of Electronics and Electrical Engineering, Keio University.
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ナカノ ノブヒコ
Instructor Dept. Of Electronics And Electrical Engineering Keio University.
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マツイ ジュン
Student Dept. Of Electronics And Electrical Engineering Keio University
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マカベ トシアキ
Professor Dept. Of Electronics And Electrical Engineering Keio University
関連論文
- Electron Transport to a Substrate in an rf Capacitively Coupled Plasma by the Boltzmann Equation
- Two Dimensional Modeling of a Two Frequency Driven Plasma in Ar