<論文>MOSFETの製作
スポンサーリンク
概要
- 論文の詳細を見る
Progress of semiconductor industry is remarkable. Technological innovation of IC makes rapidly progress. Recently IC technology is applied in various industries. Practical education of IC technology is required and tried in some colleges and universities. In our college a cleanroom of class 10,000 was built and the minimum equipments for bipolar transistor fabrication were prepared in the year 1990. At present the MOSFET plays a more important part in electric appliances than the bipolar transistor. On the condition of limited equipments we have searched after the ability of MOSFET fabrication. Glass masks of 20μm minimum feature sizes were made by desighning circuit layout with a CAD soft, cutting a red sheet laminated a transparent plastic sheet, reducing the scale of circuit patterns to a tenth part with a camera and being directly transfered the circuit patterns from a role of 24×36mm film. MOSFET's with Al gates and without the LOCOS technique were produced.
- 神戸市立工業高等専門学校の論文
- 1997-02-28