Influence of Femtosecond Laser Pulse Number on Spike Geometry of Microstructured Silicon

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概要

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2013-05-25

著者

Zhu Yiming
Engineering Research Center Of Optical Instrument And System Ministry Of Education University Of Shanghai For Science And Technology
Fang Dan
Engineering Research Center of Optical Instrument and System, Ministry of Education, Shanghai Key Lab of Modern Optical System, Institute of Optical-Electrical Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
Peng Yan
Engineering Research Center of Optical Instrument and System, Ministry of Education, Shanghai Key Lab of Modern Optical System, Institute of Optical-Electrical Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
Zhou Yunyan
Engineering Research Center of Optical Instrument and System, Ministry of Education, Shanghai Key Lab of Modern Optical System, Institute of Optical-Electrical Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
Chen Xiangqian
Engineering Research Center of Optical Instrument and System, Ministry of Education, Shanghai Key Lab of Modern Optical System, Institute of Optical-Electrical Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
HONG Miao
Engineering Research Center of Optical Instrument and System, Ministry of Education, Shanghai Key Lab of Modern Optical System, Institute of Optical-Electrical Engineering, University of Shanghai for Science and Technology
CAI Bin
Engineering Research Center of Optical Instrument and System, Ministry of Education, Shanghai Key Lab of Modern Optical System, Institute of Optical-Electrical Engineering, University of Shanghai for Science and Technology

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