Infrared-Light Interferometry and a Phase-Stepping Algorithm for Measuring the Three-Dimensional Topography of Components Covered with GaAs or Si
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概要
- 論文の詳細を見る
- 2012-02-01
著者
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Liu Jun
Key Lab Of New Drugs Design And Discovery Of Liaoning Province School Of Pharmaceutical Engineering
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Niu Kangkang
Key Laboratory Of Instrumentation Science And Dynamic Measurement North University Of China Ministry Of Education National Key Laboratory Of Science And Technology On Electronic Test And Measurement
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Chou Xiujian
Key Laboratory Of Instrumentation Science And Dynamic Measurement North University Of China Ministry Of Education National Key Laboratory Of Science And Technology On Electronic Test And Measurement
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LIU Yi
Key Laboratory of Instrumentation Science and Dynamic Measurement, North University of China, Ministry of Education National Key Laboratory of Science and Technology on Electronic Test and Measurement
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XUE Chenyang
Key Laboratory of Instrumentation Science and Dynamic Measurement, North University of China, Ministry of Education National Key Laboratory of Science and Technology on Electronic Test and Measurement
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ZHANG Wendong
Key Laboratory of Instrumentation Science and Dynamic Measurement, North University of China, Ministry of Education National Key Laboratory of Science and Technology on Electronic Test and Measurement
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Xue Chenyang
Key Laboratory Of Instrumentation Science And Dynamic Measurement North University Of China Ministry Of Education National Key Laboratory Of Science And Technology On Electronic Test And Measurement
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Zhang Wendong
Key Laboratory Of Instrumentation Science And Dynamic Measurement North University Of China Ministry Of Education National Key Laboratory Of Science And Technology On Electronic Test And Measurement
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Liu Jun
Key Laboratory Of Instrumentation Science And Dynamic Measurement North University Of China Ministry Of Education National Key Laboratory Of Science And Technology On Electronic Test And Measurement
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Liu Yi
Key Laboratory Of Instrumentation Science And Dynamic Measurement North University Of China Ministry Of Education National Key Laboratory Of Science And Technology On Electronic Test And Measurement
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- Infrared-Light Interferometry and a Phase-Stepping Algorithm for Measuring the Three-Dimensional Topography of Components Covered with GaAs or Si