High-Mobility Thin-Film Transistors with Polycrystalline In-Ga-O Channel Fabricated by DC Magnetron Sputtering
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概要
- 論文の詳細を見る
- 2012-01-25
著者
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Ebata Kazuaki
Advanced Technology Research Laboratories Idemitsu Kosan Co. Ltd.
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Iitsuka Takashi
Advanced Technology Research Laboratories Idemitsu Kosan Co. Ltd.
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TOMAI Shigekazu
Advanced Technology Research Laboratories, Idemitsu Kosan Co., Ltd.
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TSURUMA Yuki
Advanced Technology Research Laboratories, Idemitsu Kosan Co., Ltd.
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MATSUZAKI Shigeo
Advanced Technology Research Laboratories, Idemitsu Kosan Co., Ltd.
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YANO Koki
Advanced Technology Research Laboratories, Idemitsu Kosan Co., Ltd.
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Yano Koki
Advanced Technology Research Laboratories Idemitsu Kosan Co. Ltd.
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Tsuruma Yuki
Advanced Technology Research Laboratories Idemitsu Kosan Co. Ltd.
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Tomai Shigekazu
Advanced Technology Research Laboratories Idemitsu Kosan Co. Ltd.
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Matsuzaki Shigeo
Advanced Technology Research Laboratories Idemitsu Kosan Co. Ltd.
関連論文
- High-Performance Thin Film Transistor with Amorphous InOSnOZnO Channel Layer (Special Issue : Active-Matrix Flatpanel Displays and Devices : TFT Technologies and FPD Materials)
- High-Mobility Thin-Film Transistors with Polycrystalline In-Ga-O Channel Fabricated by DC Magnetron Sputtering