On the effect of crystallographic orientation on ductile material removal in silicon
スポンサーリンク
概要
- 論文の詳細を見る
- 2005-01-01
著者
-
Marsh Eric
The Pennsylvania State University
-
COUEY Jeremiah
The Pennsylvania State University
-
O'connor Brian
Aerotech Inc.
関連論文
- Techniques for calibrating spindles with nanometer error motion
- On the effect of crystallographic orientation on ductile material removal in silicon