Techniques for calibrating spindles with nanometer error motion
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概要
- 論文の詳細を見る
- 2005-01-01
著者
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Marsh Eric
The Pennsylvania State University
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GREJDA Robert
Corning Tropel Corporation
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VALLANCE Ryan
The George Washington University
関連論文
- Techniques for calibrating spindles with nanometer error motion
- On the effect of crystallographic orientation on ductile material removal in silicon