Gas Permeation Property of SiC Membrane Using Curing of Polymer Precursor Film by Electron Beam Irradiation in Helium Atmosphere
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概要
- 論文の詳細を見る
- 2011-06-10
著者
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Yoshikawa Masahito
Quantum Beam Science Directorate Japan Atomic Energy Agency
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SUGIMOTO Masaki
Quantum Beam Science Directorate, Japan Atomic Energy Agency
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Sugimoto Masaki
Quantum Beam Science Directorate Japan Atomic Energy Agency
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Takeyama Akinori
Quantum Beam Science Directorate Japan Atomic Energy Agency
関連論文
- Preparation of Silicon Carbide-based Nanoporous Materials by Replica Technique
- Surface Electronic Properties of Discontinuous Pd Films during Hydrogen Exposure
- Gas Permeation Property of SiC Membrane Using Curing of Polymer Precursor Film by Electron Beam Irradiation in Helium Atmosphere
- Gasochromic Properties of Nanostructured Tungsten Oxide Films Prepared by Sputtering Deposition