The Utility of Droplet Elimination by Thermal Annealing Technique for Fabrication of GaN/AlGaN Terahertz Quantum Cascade Structure by Radio Frequency Molecular Beam Epitaxy

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概要

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• We investigated the utility of a droplet elimination by thermal annealing (DETA) technique during the radio-frequency molecular beam epitaxy growth of a quantum cascade laser (QCL) structure. DETA is a method in which droplets deposited on the surface are eliminated by temporarily increasing the substrate temperature. DETA is a useful method which makes it possible not only to increase the number of periods in the QC structure, but also to improve the surface and structural properties of the QC structure. We could successfully increase the radiant intensity from a QCL sample by increasing the number of periods in the stacked QC structure with the DETA method.

• Japan Society of Applied Physicsの論文
• 2010-12-25

著者

• Terashima Wataru

  Terahertz Quantum Device Laboratory Riken

関連論文

• The Utility of Droplet Elimination by Thermal Annealing Technique for Fabrication of GaN/AlGaN Terahertz Quantum Cascade Structure by Radio Frequency Molecular Beam Epitaxy

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