Monitoring of Surface Treatment Effects on Sputter-coated Organic Film under Atomic Oxygen and Ultraviolet Irradiation
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概要
- 論文の詳細を見る
- 2010-02-05
著者
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Noda Kazutoshi
Institute For Environmental Management Technology National Institute Of Advanced Industrial Science
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MATSUMOTO Hiroyuki
Corporate Advanced Technology Center, Iwasaki Electric Co., Ltd.
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IWASAKI Tatsuyuki
Corporate Advanced Technology Center, Iwasaki Electric Co., Ltd.
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KINOSHITA Shinobu
Corporate Advanced Technology Center, Iwasaki Electric Co., Ltd.
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IWAMORI Satoru
Graduate School of Natural Science and Technology, Kanazawa University
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Iwamori Satoru
Graduate School Of Natural Science And Technology Kanazawa University
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Iwasaki Tatsuyuki
Corporate Advanced Technology Center Iwasaki Electric Co. Ltd.
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Kinoshita Shinobu
Corporate Advanced Technology Center Iwasaki Electric Co. Ltd.
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Matsuoka Mikihiko
Corporate Advanced Technology Center Iwasaki Electric Co. Ltd.
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Matsumoto Hiroyuki
Corporate Advanced Technology Center Iwasaki Electric Co. Ltd.
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Noda Kazutoshi
Institute For Environmental Management Technology National Institute Of Advanced Industrial Science
関連論文
- Sensitivity Improvement in the Detection of Trichloroethylene by Applying Oxidizing Agents to the Quartz Crystal Microbalance Method
- Investigation of Silver Oxidation Behavior under Active Oxygen Processing Utilizing the Quartz Crystal Microbalance Method
- Monitoring of Surface Treatment Effects on Sputter-coated Organic Film under Atomic Oxygen and Ultraviolet Irradiation
- Development of an Active Oxygen Detector Using a Quartz Crystal Microbalance with a Carbon/Silver Layer
- Active oxygen monitor using quartz crystal microbalance method with polymer detection layers
- Adsorption Properties of Thin Films Prepared by RF Sputtering with a Poly(biphenyltetracarboxylic dianhydride–paraphenylene diamine) Polyimide Target
- Gas Adsorption Properties of Fluorocarbon Thin Films Prepared Using Three Different Types of RF Magnetron Sputtering Systems