Observation of Blue-Light Emission from Tantalum Oxide Films Deposited by Radio-Frequency Magnetron Sputtering

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概要

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• We obtained blue photoluminescence from tantalum oxide films deposited by radio-frequency magnetron sputtering after annealing. The maximum peak intensity of the photoluminescence was observed from a sample annealed at 600°C for 20min, and the peak wavelength was approximately 430nm. Tantalum oxide films that emit blue light may be useful materials for novel active optical devices utilizing Ta2O5/SiO2 multilayered photonic crystals.

• （社）電子情報通信学会の論文
• 2008-10-01

著者

• Miura Kenta

  Graduate School Of Engineering Gunma University

• Hanaizumi Osamu

  Graduate School Of Engineering Gunma University

• MIYAZAKI Hiroki

  Graduate School of Engineering, Gunma University

• Miyazaki Hiroki

  Graduate School Of Engineering Gunma University

関連論文

• Observation of Blue-Light Emission from Tantalum Oxide Films Deposited by Radio-Frequency Magnetron Sputtering
• Modified FDTD method for triangular lattice photonic crystals (光エレクトロニクス)
• Intense photoluminescence from erbium-doped tantalum oxide thin films deposited by sputtering

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