MCS放電の並列動作による大気圧プラズマの大容積化に関する研究

概要

論文の詳細を見る
We research parallel microhollow cathode sustained (MCS) discharge plasma that is generated by parallel operations of the Microhollow cathode discharge (MHCD) plasma to produce a large volume atmospheric pressure plasma. We propose the cylindrical parallel MCS discharge plasma expecting electron supply by MHCD plasma and electron trapping effects of logarithm potential. Several MHCD electrodes are placed on cylindrical surface of 19 mm in radius and a thin wire is placed at a cylinder center axis. MHCD electrodes are supplied repetitive pulse voltage and the central wire anode is supplied DC voltage. So far, 8 parallel MCS discharge plasmas could be generated at 50 kPa. In this paper, the relationship between axial distance of MHCD electrodes and number of parallel discharge electrodes, and the condition to increase power supplied to MCS discharge were studied. Axial distance of MHCD electrodes were arranged to 6 mm and 16 parallel cylindrical MCS discharge in atmospheric pressure was generated. Power supplied to MCS discharge could be increased without decreasing number of parallel discharge electrodes by reducing current limiting resistor and shortening MHCD pulse width.
2010-08-01