A Clean Source of Ground-State N atoms : Decomposition of N_2 on Heated Tungsten

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概要

• 論文の詳細を見る
• 2010-07-25

著者

• UMEMOTO Hironobu

  Faculty of Engineering, Shizuoka University

• Umemoto Hironobu

  Faculty Of Engineering Shizuoka University

関連論文

• A Clean Source of Ground-State N atoms : Decomposition of N_2 on Heated Tungsten
• Photoresist Removal Using Atomic Hydrogen Generated by Hot-Wire Catalyzer and Effects on Si-Wafer Surface

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