Development of chemically amplified reaction development patterning
スポンサーリンク
概要
- 論文の詳細を見る
- Society of Polymer Science, Japanの論文
- 2010-01-15
著者
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Cheng Xu
Faculty Of Engineering Department Of Advanced Materials Chemistry Yokohama National University
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Takahashi Akio
Faculty Of Engineering Department Of Advanced Materials Chemistry Yokohama National University
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OYAMA Toshiyuki
Faculty of Engineering, Department of Advanced Materials Chemistry, Yokohama National University
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Oyama Toshiyuki
Yokohama National Univ. Yokohama Jpn
関連論文
- Effect of maleimide compounds on pattern-forming property of photosensitive polyimide based on negative-tone reaction development patterning
- Examination of pattern-forming conditions in negative-tone reaction development patterning
- Development of chemically amplified reaction development patterning