Very Low Energy Scanning Electron Microscopy of Free-Standing Ultrathin Films
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概要
- 論文の詳細を見る
- Japan Institute of Metalsの論文
- 2010-02-01
著者
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Frank Ludek
Institute Of Scientific Instruments Of The Ascr V. V. I.
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Frank Ludek
Institute Of Scientific Instruments Academy Of Sciences Of The Czech Republic
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Frank Ludek
Electron Optics Department Institute Of Scientific Instruments Ascr
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Mullerova Ilona
Institute Of Scientific Instruments Of The Ascr V.v.i.
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Mullerova Ilona
Institute Of Scientific Instruments Academy Of Sciences Of The Czech Republic
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Hovorka Milos
Institute Of Scientific Instruments Of The Ascr V. V. I.
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HANZLIKOVA Renata
Institute of Scientific Instruments of the ASCR, v. v. I.
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Hanzlikova Renata
Institute Of Scientific Instruments Of The Ascr V. V. I.
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- Profiling N-Type Dopants in Silicon
- Dopant Contrast in Semiconductors as Interpretation Challenge at Imaging by Electrons
- Very Low Energy Scanning Electron Microscopy of Free-Standing Ultrathin Films
- Acquisition of the Angular Distribution of Backscattered Electrons at Low Energies
- The Development of the scanning low energy electron microscopy (SLEEM) for the conventional SEM : 2. Application for Practical samples(研究課題:ナノスケール組織を有する軽量材料の開発とその構造解析に関する研究)
- Noise in secondary electron emission : the low yield case