Comparison with Film Substrates of Polyimide and Ni for Cantilevered Magnetic Actuators
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概要
- 論文の詳細を見る
- 2007-07-01
著者
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ISHIYAMA Kazushi
Research Institute of Electrical Communication, Tohoku University
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Ishiyama Kazushi
Research Institute Of Electrical Communication Tohoku University
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Arai Ken
Research Institute Of Electrical Communication Tohoku University
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YOKOTA Chikako
Research Institute of Electrical Communication, Tohoku University
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Yokota Chikako
Research Institute Of Electrical Communication Tohoku University
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