III-V族混晶半導体の化学熱力学と結晶成長プロセス

概要

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The group III-V compound semiconductors and their solid solutions are important materials used in high speed electronic and optical electronic devices. Crystal growth of these semiconductor materials involves processes between the solid and liquid phases or solid and gas phase at near equilibrium conditions. Therefore, knowledge of thermodynamic and thermochemical properties for the semiconductor systems is important for providing optimum conditions in the analysis of processes for the crystal growth. In this report, some thermodynamic and thermochemical data such as heat capacity, standard entropy, heat and free energy of formation of compounds and heat of mixing of solid solutions on calorimetry are summarized. Base on these data, the vapor epitaxial growth of the III-V solid solution crystal are analyzed thermodynamically. The calculated compositions of the alloys have been compared with experiment, showing remarkably good agreement.
2009-07-25