Functional Pentacene Thin Films Grown by In-Line Organic Vapor Phase Deposition at Web Speeds above 2 m/min

概要

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We show in this paper that the organic vapor phase deposition technique can advantageously be extended to an in-line system, where a susceptor moves at a constant speed underneath an elongated showerhead. Highly uniform pentacene films are grown at web speeds of up to 2.1 m/min, equivalent to an average deposition rate of 105 $Å$/s in a static system. These pentacene films are of high electrical quality as proven by transistor mobilities of up to 1.5 cm2 V-1 s-1 and five-stage ring oscillators on foil that achieve a frequency of 24 kHz at a supply voltage of 20 V.
Japan Society of Applied Physicsの論文
2009-08-25