Real-Time Diagnosis of Nano-Sized Contaminant Particles Generated in TiN Metal Organic Chemical Vapor Deposition
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概要
- 論文の詳細を見る
- Japan Society of Applied Physicsの論文
- 2009-03-25
著者
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Kim Taesung
School Of Mechanical Engineering Sungkyunkwan University
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Shin Yong-hyeon
Vacuum Center Korea Research Institute Of Standards And Science
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NA Jeonggil
School of Mechanical Engineering, Sungkyunkwan University
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CHOI Jae-Boong
School of Mechanical Engineering, Sungkyunkwan University
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YUN Ju-Young
Vacuum Center, Korea Research Institute of Standards and Science
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KANG Sang-Woo
Vacuum Center, Korea Research Institute of Standards and Science
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Kang Sang-woo
Vacuum Center Korea Research Institute Of Standards And Science
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Na Jeonggil
School Of Mechanical Engineering Sungkyunkwan University
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Yun Ju-young
Vacuum Center Korea Research Institute Of Standards And Science
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Choi Jae-boong
School Of Mechanical Engineering Sungkyunkwan University
関連論文
- Real-Time Diagnosis of Nano-Sized Contaminant Particles Generated in TiN Metal Organic Chemical Vapor Deposition
- Development of an Integrity Evaluation System for Nuclear Power Plants