Improvement of Superconductive Properties of Mesoscopic Nb Wires by Ti Passivation Layers
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概要
- 論文の詳細を見る
We have investigated superconductive properties of nano-scale Nb wires fabricated by a simple lift-off process with magnetron sputtering. The superconductive properties of the Nb wires were remarkably improved by employing highly plasma resistant electron-beam resist ZEP520A combined with a thin Ti passivation layer. This optimized fabrication process yielded a 300-nm-wide Nb wire with the same transition temperature as that of the reference Nb film. Thereby, a highly transparent Nb/Cu junction was successfully fabricated.
- Japan Society of Applied Physicsの論文
- 2008-02-25
著者
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KIMURA Takashi
Institute of Laser Engineering, Osaka University
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Ohnishi Kohei
Institute For Solid State Physics University Of Tokyo
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Otani Yoshichika
Institute For Solid State Physics University Of Tokyo
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Ohnishi Kohei
Univ. Tokyo Chiba Jpn
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Kimura Takashi
Institute For Solid State Physics University Of Tokyo
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