Numerical Analysis on Microwave Discharge Mechanism of Planar Type Surface-Wave Processing Plasma
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概要
- 論文の詳細を見る
- 1998-10-09
著者
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Chen Qing
Department of Natural Medicinal Chemistry, China Pharmaceutical University
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Chen Qing
Department Of Electrical Engineering University Of Tokyo
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Katsurai Makoto
Department Of Electrical Engineering University Of Tokyo
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MORINO Tatsuro
Department of Electrical Engineering University of Tokyo
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Katsurai Makoto
Department Of Advanced Energy Graduate School Of Frontier Sciences The University Of Tokyo
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