Experimental Studies for High Temperature Non-equilibrium Plasma sustained by Low-Frequency Discharge at Atmospheric Pressure

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概要

• 論文の詳細を見る
• 2002-08-05

著者

• Katsurai Makoto

  Graduate School Of Engineering The University Of Tokyo

• NAKANO Satoshi

  Graduate school of Engineering, The University of Tokyo

• Nakano Satoshi

  Graduate School Of Engineering The University Of Tokyo

関連論文

• Spatial profile control of electron density and plasma space potential and generations of high-quality diamond films in the 2.45GHz surface wave type plasma processing devices
• Experimental Studies for High Temperature Non-equilibrium Plasma sustained by Low-Frequency Discharge at Atmospheric Pressure

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