Spatial profile control of electron density and plasma space potential and generations of high-quality diamond films in the 2.45GHz surface wave type plasma processing devices

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概要

• 論文の詳細を見る
• 2003-12-16

著者

• Kim Jaeho

  Graduate School Of Frontier Sciences University Of Tokyo

• KATSURAI Makoto

  Graduate School of Frontier Sciences, University of Tokyo

• TOBA Takayuki

  Graduate School of Engineering, University of Tokyo

• Katsurai Makoto

  Graduate School Of Engineering The University Of Tokyo

• Toba Takayuki

  Graduate School Of Engineering University Of Tokyo

• Katsurai Makoto

  Graduate School Of Frontier Sciences University Of Tokyo

関連論文

• Spatial profile control of electron density and plasma space potential and generations of high-quality diamond films in the 2.45GHz surface wave type plasma processing devices
• Experimental Studies for High Temperature Non-equilibrium Plasma sustained by Low-Frequency Discharge at Atmospheric Pressure

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