Annealing Effect on the Optical Properties of a-SiC:H Films Deposited by PECVD
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概要
- 論文の詳細を見る
- Japan Institute of Metalsの論文
- 2002-08-01
著者
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YOON Dae-Ho
Department of Advanced Materials Engineering, Sungkyunkwan University
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Kim Yong-tak
Department Of Advanced Materials Engineering Sungkyunkwan University
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Suh Su-jeong
Department Of Advanced Materials Engineering Sungkyunkwan University
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Yoon Dae-ho
Department Of Advanced Materials Engineering Sungkyunkwan University
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CHO Sung-Min
Department of Advanced Materials Engineering, Sungkyunkwan University
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HONG Byoungyou
School of Electrical & Computer Engineering, Sungkyunkwan University
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JANG Gun-Eik
Department of Materials Science & Materials Engineering, Chungbuk University
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Cho Sung-min
Department Of Advanced Materials Engineering Sungkyunkwan University
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Jang Gun-eik
Department Of Materials Science & Materials Engineering Chungbuk University
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Hong Byoungyou
School Of Electrical & Computer Engineering Sungkyunkwan University
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- Annealing Effect on the Optical Properties of a-SiC:H Films Deposited by PECVD
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