Generation Mechanism of Etching Damages on Low-k SiOCH Films and Development of Novel Damage Evaluation Technique

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概要

• 論文の詳細を見る
• 2007-09-19

著者

• Hori Masaru

  Nagoya Univ. Dept. Of Electric Engineering And Computer Science

関連論文

• Generation Mechanism of Etching Damages on Low-k SiOCH Films and Development of Novel Damage Evaluation Technique
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• Field Emissions from Organic Nanorods Armored with Metal Nanoparticles

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