Atomic Layer Deposition of PMOS Metal Gate Electrodes and High-k/Metal Interface Reactions for Advanced Device Applications
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概要
- 論文の詳細を見る
- 2005-09-13
著者
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PARK K.
Department of Physiology, School of Dentistry and Dental Research Institute, Seoul National Universi
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Parsons G.
Department Of Chemical And Biomolecular Engineering North Carolina State University
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TERRY D.
Department of Chemical and Biomolecular Engineering North Carolina State University
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