Effects of Voltage Cycling on Polarization and Reliability of 3D SBT Ferroelectric Capacitors Integrated in 0.18μm CMOS Technology
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概要
- 論文の詳細を見る
- 2005-09-13
著者
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Wouters Dirk
Imec Silicon Process And Device Technology Division
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Zambrano Raffaele
Stmicroelectronics Memory Products Group
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WOUTERS Dirk
IMEC, Silicon Process and Device Technology Division
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GOUX Ludovic
IMEC, Silicon Process and Device Technology Division
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LISONI Judit
IMEC, Silicon Process and Device Technology Division
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MAES David
IMEC, Silicon Process and Device Technology Division
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MEEREN Hans
IMEC, Silicon Process and Device Technology Division
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PARASCHIV Vasile
IMEC, Silicon Process and Device Technology Division
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HASPESLAGH Luc
IMEC, Silicon Process and Device Technology Division
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ARTONI Cesare
STMicroelectronics, Memory Products Group
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CORALLO Giuseppina
STMicroelectronics, Memory Products Group
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Maes David
Imec Silicon Process And Device Technology Division
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Meeren Hans
Imec Silicon Process And Device Technology Division
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Lisoni Judit
Imec Silicon Process And Device Technology Division
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Goux Ludovic
Imec Silicon Process And Device Technology Division
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Artoni Cesare
Stmicroelectronics Memory Products Group
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Haspeslagh Luc
Imec Silicon Process And Device Technology Division
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Paraschiv Vasile
Imec Silicon Process And Device Technology Division
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Corallo Giuseppina
Stmicroelectronics Memory Products Group
関連論文
- Effects of Voltage Cycling on Polarization and Reliability of 3D SBT Ferroelectric Capacitors Integrated in 0.18μm CMOS Technology
- Silicon Based System for Single-Nucleotide-Polymorphism Detection : Chip Fabrication and Thermal Characterization of Polymerase Chain Reaction Microchamber (Special Issue : Solid State Devices and Materials (2))