Characterization of Self Assembled Monolayers for Ultra Low-k Films
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概要
- 論文の詳細を見る
- 2005-09-13
著者
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Frye Don
The Dow Chemical Company
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Yong K.
National University Of Singapore School Of Electrical & Computer Eng.
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MURTHY B.
Semiconductor Process Technologies, Institute of Microelectronics
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YEE Wan
Nanyang Technological University, School of Electrical & Electronic Eng.
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KRISHNAMOORTHY Ahila
Semiconductor Process Technologies, Institute of Microelectronics
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ANAND V.
Nanyang Technological University, School of Electrical & Electronic Eng.
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CHOY S.
Semiconductor Process Technologies, Institute of Microelectronics
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PRASAD K.
Nanyang Technological University, School of Electrical & Electronic Eng.
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KUMAR R.
Semiconductor Process Technologies, Institute of Microelectronics
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Yee Wan
Nanyang Technological University School Of Electrical & Electronic Eng.
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Krishnamoorthy Ahila
Semiconductor Process Technologies Institute Of Microelectronics
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Murthy B.
Semiconductor Process Technologies Institute Of Microelectronics
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Anand V.
Nanyang Technological University School Of Electrical & Electronic Eng.
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Choy S.
Semiconductor Process Technologies Institute Of Microelectronics
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Prasad K.
Nanyang Technological University School Of Electrical & Electronic Eng.
関連論文
- Characterization of Self Assembled Monolayers for Ultra Low-k Films
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