Effect of Pore Generating Materials on the Electrical and Mechanical Properties of Porous Low-k Films
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概要
- 論文の詳細を見る
- 2005-09-13
著者
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Char Kookheon
School Of Chemical And Biological Engineering And Nano Systems Institute-national Core Research Cent
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KIM Suhan
School of Chemical and Biological Engineering and NANO Systems Institute-National Core Research Cent
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HAHN Junhee
Division of Chemical Metrology & Materials Evolution, Korea Research Institute of Standards and Scie
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Char Kookheon
School Of Chemical And Biological Engineering And Nano Systems Institute-national Core Research Cent
-
Hahn Junhee
Division Of Chemical Metrology & Materials Evolution Korea Research Institute Of Standards And S
-
Kim Suhan
School Of Chemical And Biological Engineering And Nano Systems Institute-national Core Research Cent
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