Dopant Activation Enhancement in Silicon by Hydrogen Treatment

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概要

• 論文の詳細を見る
• 2005-09-13

著者

• Vengurlekar A.

  Department Of Engineering Science The Pennsylvania State University

• ASHOK S.

  Department of Engineering Science, The Pennsylvania State University

関連論文

• Effect of Hydrogen on Helium implant-induced Nanocavities
• Dopant Activation Enhancement in Silicon by Hydrogen Treatment

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