Effect of Hydrogen on Helium implant-induced Nanocavities
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概要
- 論文の詳細を見る
- 2005-09-13
著者
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Vengurlekar A.
Department Of Engineering Science The Pennsylvania State University
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ASHOK S.
Department of Engineering Science, The Pennsylvania State University
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NTSOENZOK E.
CERI/CNRS
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THEODORE N.
Advanced Products R&D Lab, Freescale Semiconductor
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Theodore N.
Advanced Products R&d Lab Freescale Semiconductor
関連論文
- Effect of Hydrogen on Helium implant-induced Nanocavities
- Dopant Activation Enhancement in Silicon by Hydrogen Treatment