Impact of Co-salicide capping layer on GIDL in High Voltage devices for Embedded Flash memory

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概要

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2004-09-15

著者

Shukla Dhruva
Process Integration Department Systems On Silicon Manufacturing Co. Pte. Ltd.
Zhao Jing
Process Integration Department Systems On Silicon Manufacturing Co. Pte. Ltd.
Huang Qiang
Process Integration Department Systems On Silicon Manufacturing Co. Pte. Ltd.
Kim Nam
Process Integration Department Systems On Silicon Manufacturing Co. Pte. Ltd.
Han Sang
Process Integration Department Systems On Silicon Manufacturing Co. Pte. Ltd.
You Young
Process Integration Department Systems On Silicon Manufacturing Co. Pte. Ltd.
MUKHO Madhusudan
Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
NG Yeow
Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
YEW Wong
Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
JAUW How
Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
YOON Hyun
Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
GOH Inn
Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
Ng Yeow
Process Integration Department Systems On Silicon Manufacturing Co. Pte. Ltd.
Goh Inn
Process Integration Department Systems On Silicon Manufacturing Co. Pte. Ltd.
Yew Wong
Process Integration Department Systems On Silicon Manufacturing Co. Pte. Ltd.
Jauw How
Process Integration Department Systems On Silicon Manufacturing Co. Pte. Ltd.
Mukho Madhusudan
Process Integration Department Systems On Silicon Manufacturing Co. Pte. Ltd.
Yoon Hyun
Process Integration Department Systems On Silicon Manufacturing Co. Pte. Ltd.

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