Simple Fabrication of Nanopyramid Array (NPA) on Si Surface by Means of Focused Ion Beam Patterning and Wet Etching
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概要
- 論文の詳細を見る
- 1999-09-20
著者
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GOTO T.
School of Science and Engineering, Waseda University
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Ohdomari I.
Kagami Memorial Laboratory For Materials Science And Technology Waseda University
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KOH M.
Kagami Memorial Laboratory for Materials Science and Technology, Waseda University
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SHINADA T.
School of Science and Engineering, Waseda University
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SAWARA S.
School of Science and Engineering, Waseda University
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ANDO Y.
School of Science and Engineering, Waseda University
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Shinada T.
School Of Science And Engineering Waseda University
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Koh M.
Kagami Memorial Laboratory For Materials Science And Technology Waseda University
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Sawara S.
School Of Science And Engineering Waseda University
関連論文
- Simple Fabrication of Silicon Nanopyramids for High Performance Field Emitter Array
- Simple Process for Buried Nanopyramid Array (BNPA) Fabrication by Means of Dopant Ion Implantation and Dual Wet Etching
- Simple Fabrication of Nanopyramid Array (NPA) on Si Surface by Means of Focused Ion Beam Patterning and Wet Etching