Detection of dilute aromatic VOCs using WO3 thin film sensors equipped with Au interdigitated microelectrode (特集 VOCガスのセンシング)
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概要
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Sensing properties to dilute aromatic VOCs (toluene, xylene, ethylbenzene, and styrene) have been investigated for the WO3 thin film microsensors equipped with Au interdigitated microelectrode. The sensor response (S=Ra/Rg) was increased with decreasing teeth distance of interdigitated electrode in the range of 2-5 μm. The WO3 microsensor with 2 μm interdigitated electorde showed the highest sensor response to dilute aromatic VOCs at 500 °C. The WO3 microsensor with 2 μm interdigitated electrode exhibited the sufficient sensor response (S>3) to 0.01 ppm aromatic VOCs, particularly high sensor response (S=6) to 0.01 ppm xylene, at 500 °C with the excellent response-recovery characteristics. This behavior suggests that the WO3 thin film microsensors equipped with Au interdigitated microelectrode can be used as a high sensitivity aromatic VOC sensor.
- 社団法人 電気学会の論文
- 2008-04-01
著者
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Kajita Susumu
Advanced Technologies Fusion Laboratory Matsushita Electric Works Ltd.
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Tamaki Jun
Department Of Applied Chemistry Faculty Of Science And Engineering Ritsumeikan University
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MICHIBA Yuka
Department of Applied Chemistry, Faculty of Science and Engineering, Ritsumeikan University
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Michiba Yuka
Department Of Applied Chemistry Faculty Of Science And Engineering Ritsumeikan University
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Kajita Susumu
Advanced Materials Development Department Panasonic Electric Works Co. Ltd.
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