走査型マルチプローブ顕微鏡における複数プローブのナノスケール位置認識

概要

論文の詳細を見る
Multiple-scanning-probe microscopes (MPSPMs) are one of the powerful tools which can measure physical properties of nanostructures and nanodevices. However, it is, in general, difficult to operate multiple probes in a nanoscale region and to measure probe-to-probe distance before the actual property measurements. To solve such difficulty, we have developed a control system specialized for multiple-scanning-probe measurements and used the system with our home-made MPSPM operated in air. In this paper, we report that how to realize safe and easy recognition for nanoscale positional relationship between four probes by applying sample scanning method. we show, for the first time, simultaneously acquired four STM images using four independently-controlled probes. All of the four images involve the identical area on the sample surface, indicating that the four probes have scanned over the same area. Using the four STM images, we have calculated the shift vectors which describe nanoscale positional relationships between the four STM images, in other words, between four probe-to-sample contact points. This is an important achievement towards further applications of MPSPM measurements in nanotechnology.
社団法人電気学会の論文
2007-09-01